Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafers
| Property | Dimension | Tolerance | Units |
| Diameter | 150 | +/-0.5 | |
| Thickness,Center Point | |||
| Option A | 675 | ±25 | um |
| Option B | 550 | ±25 | um |
| Notch Orientation | [010] | ±2 | degrees |
| Notch Depth | 1 | +0.25/-0.0 | mm |
Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafers
| Property | Dimension | Tolerance | Units |
| Diameter | 100 | ±0.5 | mm |
| Thickness,Center Point | 675 | ±25 | um |
| Primary Flat Lenght | 32.5 | ±2 | mm |
| Secondary Flat Lenght | 18 | ±2 | mm |
| : US/SEMI and E/J-Flat-Option available | |||
Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafers
| Property | Dimension | Tolerance | Units |
| Diameter | 200 | ±0.5 | mm |
| Thickness,Center Point | 625 | ±25 | um |
| Notch Orientation | [010] | ±2 | degrees |
| Notch Depth | 1 | +0.25/-0.0 | mm |
Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafers
| Property | Dimension | Tolerance | Units |
| Diameter | 76.2 | ±0.5 | mm |
| Thickness,Center Point | 625 | ±25 | um |
| Primary Flat Lenght | 22 | ±2 | mm |
| Secondary Flat Lenght | 11 | ±2 | mm |
| :US/SEMI and E/J-Flat-Option available | |||